PacLine 300 A50
The – PacLine 300 A50 – is a fully automated equipment for electroless deposition of Ni/Au, NiPd or NiPdAu bumps on semiconductor wafers with Al or Cu pad metallization. The system is able to process carriers with 50 wafers up to 8” and 20 wafers 12”.
The PacLine contains of a complete software solution for recipe management, process control and data logging. Complex failure and emergency routines are providing a secure system operation for handling of up to 4 process carrier in parallel. The usage of SECS GEM communication protocol enables direct interfacing with the facility host and flexible final adjustment on customer requirements.
Pac Tech is offering standard configured and industry proven bumping line’s as well as customized wet benches. The modular bumping line consists of an input/output station, a customized number of process modules, Quick Dump Rinse tanks, drying station and automatic Ni stripping.
Pac Tech offers a turnkey solution by delivering the equipment and the process chemicals in combination with a technology transfer.PacLine 300 A50 (Product Brochure Download)
SAW- and Fbar-Filters
integration in existing FAB software/hardware infrastructure
Already installed at leading OEM production sites
World wide support team located at Nauen (Germany); Silicon Valley (USA); Penang (Malaysia); Bangkok (Thailand)
Turnkey process solution
Equipment, Process Transfer, Chemistry
Maximum Flexibility for 4”- 12” with no tooling
Compliant with Semi S2 ; FM 4910 and CE
Flexibility in customer specific requirements/adaptations
|Dimensions L x W x H||approx. 14000 x 1930 x 2400 mm (for NiPdAu and Al & Cu)|
|Throughput||up to 600,000 wafer per hour (8“)
up to 300,000 wafer per hour (12”)
|Parallel processing (same product) of 4 baskets||each basket à 50 wafers 8’’ or 3 baskets with 20 wafers 12’’|
|Parallel processing (different recipe per each basket, recipes to be provided to PacLine via SECS GEM) of 3 baskets||each basket à 50 wafers 8’’ or 3 baskets with 20 wafers 12’’|
|Automatic Ni bath control||Ni Online Analyzer|
|DI water:||4139 l/h (5-6 bar)|
|Cooling water:||1000 l/h (15°)|
|Waste water:||4180 l/h|
|Compressed Air:||1025 Lit/min (6 bar)|