SpinPac ASC 200/300

4~12インチウェハー対応のスピンコーティング装置

SpinPac ASC 200/300 (ダウンロード / 製品カタログ)

Highlights
  • Maximum Flexibility: 4“-12“
  • UPH: up to 600,000 wafer per year 8“
  • No tooling
  • In-line Bath Control and Replenishment
  • Total Quality Software for recipe management, process control, data logging
  • SECS GEM Interface optional
  • Turnkey Process Solution

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Benefits
Technical Specifications